JPH053150B2 - - Google Patents
Info
- Publication number
- JPH053150B2 JPH053150B2 JP58116540A JP11654083A JPH053150B2 JP H053150 B2 JPH053150 B2 JP H053150B2 JP 58116540 A JP58116540 A JP 58116540A JP 11654083 A JP11654083 A JP 11654083A JP H053150 B2 JPH053150 B2 JP H053150B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode film
- film
- semiconductor film
- electrode
- photoelectric conversion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58116540A JPS607730A (ja) | 1983-06-27 | 1983-06-27 | 集積型光起電力装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58116540A JPS607730A (ja) | 1983-06-27 | 1983-06-27 | 集積型光起電力装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS607730A JPS607730A (ja) | 1985-01-16 |
JPH053150B2 true JPH053150B2 (en]) | 1993-01-14 |
Family
ID=14689643
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58116540A Granted JPS607730A (ja) | 1983-06-27 | 1983-06-27 | 集積型光起電力装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS607730A (en]) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6066872A (ja) * | 1983-09-22 | 1985-04-17 | Semiconductor Energy Lab Co Ltd | 半導体装置作製方法 |
US20050145609A1 (en) * | 2001-02-26 | 2005-07-07 | John Gregory | Method of forming an opening or cavity in a substrate for receiving an electronic component |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5838935B2 (ja) * | 1975-02-07 | 1983-08-26 | 日本電気株式会社 | ハンドウタイハクヘンノセイゾウホウホウ |
-
1983
- 1983-06-27 JP JP58116540A patent/JPS607730A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS607730A (ja) | 1985-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4542578A (en) | Method of manufacturing photovoltaic device | |
JPH053151B2 (en]) | ||
JPH0447466B2 (en]) | ||
JPH053150B2 (en]) | ||
JP2002280580A (ja) | 集積型光起電力装置及びその製造方法 | |
JPH07105511B2 (ja) | 光起電力装置の製造方法 | |
JPH11103079A (ja) | 集積型光起電力装置の製造方法 | |
JP3521268B2 (ja) | 光起電力装置の製造方法 | |
JP2798772B2 (ja) | 光起電力装置の製造方法 | |
JPS6213829B2 (en]) | ||
JPH0519991B2 (en]) | ||
JPH053752B2 (en]) | ||
JPH0551190B2 (en]) | ||
JP2808005B2 (ja) | 非晶質太陽電池の製造方法 | |
JPS62205668A (ja) | 集積型太陽電池の製造方法 | |
JPH0464472B2 (en]) | ||
JPH0464473B2 (en]) | ||
JP3505201B2 (ja) | 光起電力装置の製造方法 | |
JPS63258077A (ja) | 光起電力装置の製造方法 | |
JPH0691269B2 (ja) | 非晶質シリコン太陽電池の製造方法 | |
JPH0560273B2 (en]) | ||
JPS61164274A (ja) | 光起電力装置の製造方法 | |
JPH0370184A (ja) | 光起電力装置の製造方法 | |
JPH0650781B2 (ja) | 半導体装置の製造方法 | |
JPS62145781A (ja) | 半導体装置の製造方法 |